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Title: Super-thin single crystal diamond membrane radiation detectors

We propose to use the non-electronic grade (nitrogen content 5 ppb < [N] < 5 ppm) single crystal (sc) chemical vapour deposited (CVD) diamond as a thin-membrane radiation detector. Using deep Ar/O{sub 2} plasma etching it is possible to produce self-supported few micrometres thick scCVD membranes of a size approaching 7 mm × 7 mm, with a very good surface quality. After metallization and contacting, electrical properties of diamond membrane detectors were probed with 5.486 MeV α-particles as an ionization source. Despite nitrogen impurity, scCVD membrane detectors exhibit stable operation, charge collection efficiency close to 100%, with homogenous response, and extraordinary dielectric strength up to 30 V/μm.
Authors:
; ;  [1]
  1. CEA-LIST, Diamond Sensors Laboratory, Gif-sur-Yvette F-91191 (France)
Publication Date:
OSTI Identifier:
22218053
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Journal Issue: 11; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 36 MATERIALS SCIENCE; CHARGE COLLECTION; CHEMICAL VAPOR DEPOSITION; DIAMONDS; DIELECTRIC MATERIALS; EFFICIENCY; ETCHING; IMPURITIES; MEMBRANES; MEV RANGE 01-10; MONOCRYSTALS; NITROGEN; OPERATION; PLASMA; PROBES; SEMICONDUCTOR DETECTORS; SPUTTERING; SURFACES