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Title: Independent control of electron energy and density using a rotating magnetic field in inductively coupled plasmas

Effects of a rotating magnetic field (RMF) on the electron energy distribution function (EEDF) and on the electron density are investigated with the aim of controlling the radical composition of inductively coupled plasmas. By adjusting the RMF frequency and generation power, the desired electron density and electron energy shift are obtained. Consequently, the amount and fraction of high-energy electrons, which are mostly responsible for direct dissociation processes of raw molecules, will be controlled externally. This controllability, with no electrode exposed to plasma, will enable us to control radical components and their flux during plasma processing.
Authors:
; ; ;  [1]
  1. Center for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University, Osaka 565-0871 (Japan)
Publication Date:
OSTI Identifier:
22218001
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 114; Journal Issue: 11; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; CONTROL; DENSITY; DISSOCIATION; ELECTRODES; ELECTRON DENSITY; ELECTRONS; ENERGY SPECTRA; MAGNETIC FIELDS; MAGNETOHYDRODYNAMICS; PLASMA DENSITY; RADICALS