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Title: Sponge-like Si-SiO{sub 2} nanocomposite—Morphology studies of spinodally decomposed silicon-rich oxide

Sponge-like Si nanostructures embedded in SiO{sub 2} were fabricated by spinodal decomposition of sputter-deposited silicon-rich oxide with a stoichiometry close to that of silicon monoxide. After thermal treatment a mean feature size of about 3 nm was found in the phase-separated structure. The structure of the Si-SiO{sub 2} nanocomposite was investigated by energy-filtered transmission electron microscopy (EFTEM), EFTEM tomography, and atom probe tomography, which revealed a percolated Si morphology. It was shown that the percolation of the Si network in 3D can also be proven on the basis of 2D EFTEM images by comparison with 3D kinetic Monte Carlo simulations.
Authors:
; ; ; ; ;  [1] ;  [2] ;  [3] ;  [4] ;  [5]
  1. Helmholtz-Zentrum Dresden – Rossendorf, Bautzner Landstr. 400, 01328 Dresden (Germany)
  2. Triebenberg Laboratory, Institute of Structure Physics, Technische Universität Dresden, 01062 Dresden (Germany)
  3. Fraunhofer Center Nanoelectronic Technologies, Königsbrücker Str. 180, 01099 Dresden (Germany)
  4. NaMLab GmbH, Nöthnitzer Str. 64, 01187 Dresden (Germany)
  5. (Germany)
Publication Date:
OSTI Identifier:
22217968
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Journal Issue: 13; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; 36 MATERIALS SCIENCE; COMPOSITE MATERIALS; COMPUTERIZED SIMULATION; DEPOSITION; DEPOSITS; FABRICATION; FILTERS; HEAT TREATMENTS; IMAGES; MONTE CARLO METHOD; NANOSTRUCTURES; SEMICONDUCTOR MATERIALS; SILICON OXIDES; SPUTTERING; STOICHIOMETRY; TOMOGRAPHY; TRANSMISSION ELECTRON MICROSCOPY