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Title: Drifting potential humps in ionization zones: The “propeller blades” of high power impulse magnetron sputtering

Ion energy distribution functions measured for high power impulse magnetron sputtering show features, such as a broad peak at several 10 eV with an extended tail, as well as asymmetry with respect to E×B, where E and B are the local electric and magnetic field vectors, respectively. Here it is proposed that those features are due to the formation of a potential hump of several 10 V in each of the traveling ionization zones. Potential hump formation is associated with a negative-positive-negative space charge that naturally forms in ionization zones driven by energetic drifting electrons.
Authors:
;  [1] ;  [1] ;  [2] ;  [1] ;  [3] ;  [1] ;  [4]
  1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720 (United States)
  2. (Slovenia)
  3. (Austria)
  4. (Singapore)
Publication Date:
OSTI Identifier:
22217948
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Journal Issue: 14; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ASYMMETRY; DISTRIBUTION FUNCTIONS; ELECTRON DRIFT; ENERGY SPECTRA; EV RANGE; IONIZATION; IONS; MAGNETIC FIELDS; MAGNETRONS; PEAKS; PLASMA; POTENTIALS; PROCESSING; PULSES; SPACE CHARGE; SPUTTERING; VECTORS; ZONES