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Title: Micro/nanofabrication of poly({sub L}-lactic acid) using focused ion beam direct etching

Micro/nanofabrication of biocompatible and biodegradable poly({sub L}-lactic acid) (PLLA) using focused Ga ion beam direct etching was evaluated for future bio-device applications. The fabrication performance was determined with different ion fluences and fluxes (beam currents), and it was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat. Focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds. Controlled micro/nanostructures of PLLA were fabricated with C=C bond-rich surfaces expected to have good cell attachment properties.
Authors:
; ;  [1] ; ;  [2] ; ;  [2] ;  [3]
  1. Quantum Beam Science Directorate, Japan Atomic Energy Agency, 1233 Watanuki-machi, Takasaki, Gunma 370-1292 (Japan)
  2. Research Institute for Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku-ku, Tokyo 169-8555 (Japan)
  3. (Japan)
Publication Date:
OSTI Identifier:
22217911
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Journal Issue: 16; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ACCURACY; ATOMS; BEAM CURRENTS; CHEMICAL BONDS; DECOMPOSITION; EQUIPMENT; ETCHING; FABRICATION; GALLIUM IONS; ION BEAMS; IRRADIATION; LACTIC ACID; NANOSTRUCTURES; PERFORMANCE; POLYMERS; SPUTTERING; SURFACES; VELOCITY; X-RAY PHOTOELECTRON SPECTROSCOPY