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Title: Nanowire-integrated microporous silicon membrane for continuous fluid transport in micro cooling device

We report an efficient passive micro pump system combining the physical properties of nanowires and micropores. This nanowire-integrated microporous silicon membrane was created to feed coolant continuously onto the surface of the wick in a micro cooling device to ensure it remains hydrated and in case of dryout, allow for regeneration of the system. The membrane was fabricated by photoelectrochemical etching to form micropores followed by hydrothermal growth of nanowires. This study shows a promising approach to address thermal management challenges for next generation electronic devices with absence of external power.
Authors:
;  [1] ;  [2]
  1. Department of Mechanical Engineering, Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720 (United States)
  2. Department of Electrical Engineering, Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720 (United States)
Publication Date:
OSTI Identifier:
22217910
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Journal Issue: 16; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; COOLANTS; COOLING; DEPOSITION; DRYOUT; ELECTRONIC EQUIPMENT; ETCHING; FABRICATION; LIQUIDS; MEMBRANES; PHYSICAL PROPERTIES; POROUS MATERIALS; PUMPS; QUANTUM WIRES; SEMICONDUCTOR MATERIALS; SILICON; SURFACES; WIRES