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Title: Optical reflectivity improvement by upgrading metallic glass film quality

The effects of atomic-defect and free-volume amounts of metallic glassy film on the optical reflectivity and mechanical properties of the sputtered metallic glass thin films are explored. With a lower Ar working pressure and the proper post-annealing at temperatures slightly lower than the glass-transition temperature T{sub g}, film free volumes and defects would reduce, resulting in better atomic bonding and higher film hardness/modulus, which in turn leads to lower electric resistivity and higher optical reflectivity. Annealing above T{sub g} would induce crystalline structure which would lead to competition with the optical transition of the Drude free electrons and hinder the optical reflectivity in the visible range.
Authors:
; ;  [1]
  1. Department of Materials and Optoelectronic Science, National Sun Yat-Sen University, Kaohsiung, 804 Taiwan (China)
Publication Date:
OSTI Identifier:
22217902
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Journal Issue: 16; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ALUMINIUM ALLOYS; ANNEALING; COMPETITION; ELECTRIC CONDUCTIVITY; GLASS; HARDNESS; MAGNESIUM ALLOYS; METALLIC GLASSES; REFLECTIVITY; SILVER ALLOYS; SPUTTERING; THIN FILMS; TRANSITION TEMPERATURE; ULTRAVIOLET SPECTRA; VISIBLE SPECTRA