Optical reflectivity improvement by upgrading metallic glass film quality
- Department of Materials and Optoelectronic Science, National Sun Yat-Sen University, Kaohsiung, 804 Taiwan (China)
The effects of atomic-defect and free-volume amounts of metallic glassy film on the optical reflectivity and mechanical properties of the sputtered metallic glass thin films are explored. With a lower Ar working pressure and the proper post-annealing at temperatures slightly lower than the glass-transition temperature T{sub g}, film free volumes and defects would reduce, resulting in better atomic bonding and higher film hardness/modulus, which in turn leads to lower electric resistivity and higher optical reflectivity. Annealing above T{sub g} would induce crystalline structure which would lead to competition with the optical transition of the Drude free electrons and hinder the optical reflectivity in the visible range.
- OSTI ID:
- 22217902
- Journal Information:
- Applied Physics Letters, Vol. 103, Issue 16; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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