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Title: Study of cavity type antenna structure of large-area 915 MHz ultra-high frequency wave plasma device based on three-dimensional finite difference time-domain analysis

A large-area planar plasma source with a resonant cavity type launcher driven by a 915 MHz ultra-high frequency wave was developed. Theoretical analysis with the three-dimensional finite difference time-domain simulation was carried out to determine the optimized launcher structure by analyzing the resonant transverse magnetic mode in the resonant cavity. Numerical result expects that the resonant electric field distribution inside the cavity dominantly consists of the TM{sub 410} mode. The resonant cavity type launcher having 8 holes in an octagonal geometry was designed to fit the resonant transverse magnetic mode. Adjusting 8 hole positions of the launcher to the field pattern of the resonant TM{sub 410} mode, we found that the plasma density increased about 40%∼50% from 1.0∼1.1 × 10{sup 11} cm{sup −3} to ∼1.5 × 10{sup 11} cm{sup −3} at the same incident power of 2.5 kW, compared with the previous results with the launcher having 6 holes in the hexagonal geometry. It is also noted that the electron density changes almost linearly with the incident wave power without any mode jumps.
Authors:
 [1] ;  [2] ;  [3] ;  [1] ;  [4] ;  [2]
  1. Department of Light Sources and Illuminating Engineering, Fudan University, 220 Handan Road, Shanghai 200433 (China)
  2. (Japan)
  3. Graduate School of Engineering, Shizuoka University,3-5-1 Johoku, Hamamatsu 432-8561 (Japan)
  4. Graduate School of Science and Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561 (Japan)
Publication Date:
OSTI Identifier:
22217863
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 114; Journal Issue: 18; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ANTENNAS; CAVITY RESONATORS; DESIGN; ELECTRIC FIELDS; ELECTRON DENSITY; HOLES; MHZ RANGE; MICROWAVE RADIATION; PLASMA DENSITY; SIMULATION