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Title: The influence of surface properties on the plasma dynamics in radio-frequency driven oxygen plasmas: Measurements and simulations

Plasma parameters and dynamics in capacitively coupled oxygen plasmas are investigated for different surface conditions. Metastable species concentration, electronegativity, spatial distribution of particle densities as well as the ionization dynamics are significantly influenced by the surface loss probability of metastable singlet delta oxygen (SDO). Simulated surface conditions are compared to experiments in the plasma-surface interface region using phase resolved optical emission spectroscopy. It is demonstrated how in-situ measurements of excitation features can be used to determine SDO surface loss probabilities for different surface materials.
Authors:
; ; ;  [1]
  1. York Plasma Institute, Department of Physics, University of York, York, YO10 5DD (United Kingdom)
Publication Date:
OSTI Identifier:
22217759
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Journal Issue: 24; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; COMPARATIVE EVALUATIONS; DENSITY; ELECTRONEGATIVITY; EMISSION SPECTROSCOPY; EXCITATION; EXCITED STATES; HIGH-FREQUENCY DISCHARGES; INTERFACES; IONIZATION; OXYGEN; PLASMA DENSITY; PLASMA DIAGNOSTICS; RADIOWAVE RADIATION; SIMULATION; SPATIAL DISTRIBUTION; SURFACE PROPERTIES; SURFACES