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Title: Cleaning of inner vacuum surfaces in the Uragan-3M facility by radio-frequency discharges

A method for cleaning vacuum surfaces by a low-temperature (T{sub e} ∼ 10 eV) relatively dense (n{sub e} ≈ 10{sup 12} cm{sup −3}) plasma of an RF discharge was developed and successfully applied at the Uragan-3M torsatron. The convenience of the method is that it can be implemented with the same antenna system and RF generators that are used to produce and heat the plasma in the operating mode and does not require retuning the frequencies of the antennas and RF generators. The RF discharge has a high efficiency from the standpoint of cleaning vacuum surfaces. After performing a series of cleanings by the low-temperature RF discharge plasma (about 20000 pulses), (i) the intensity of the CIII impurity line was substantially reduced, (ii) a quasi-steady operating mode with a duration of up to 50 ms, a plasma density of n{sub e} ≈ 10{sup 12} cm{sup −3}, and an electron temperature of up to T{sub e} ∼ 1 keV was achieved, and (iii) mass spectrometric analysis of the residual gas in the chamber indicated a significant reduction in the impurity content.
Authors:
; ; ; ;  [1] ;  [2] ; ; ; ; ;  [1] ;
  1. National Science Center Kharkiv Institute of Physics and Technology (Ukraine)
  2. Royal Military Academy, Laboratory for Plasma Physics (Belgium)
Publication Date:
OSTI Identifier:
22216090
Resource Type:
Journal Article
Resource Relation:
Journal Name: Plasma Physics Reports; Journal Volume: 39; Journal Issue: 8; Other Information: Copyright (c) 2013 Pleiades Publishing, Ltd.; http://www.springer-ny.com; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ANTENNAS; CLEANING; EFFICIENCY; ELECTRON TEMPERATURE; EV RANGE; HEAT; IMPURITIES; KEV RANGE; MASS SPECTROSCOPY; PLASMA DENSITY; PULSES; RADIOWAVE RADIATION; SURFACES; TEMPERATURE RANGE 0065-0273 K