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Title: Tungsten-incorporation induced red-shift in the bandgap of gallium oxide thin films

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4803802· OSTI ID:22162919
;  [1]
  1. Department of Mechanical Engineering, University of Texas at El Paso, El Paso, Texas 79968 (United States)

Tungsten (W) incorporated Ga{sub 2}O{sub 3} films were produced by co-sputter deposition. W-concentration was varied by the applied sputtering-power. The structure and optical properties of W-incorporated Ga{sub 2}O{sub 3} films were evaluated using X-ray diffraction, scanning electron microscopy, and spectrophotometric measurements. No secondary phase formation was observed in W-incorporated Ga{sub 2}O{sub 3} films. W-induced effects were significant on the structure and optical properties of Ga{sub 2}O{sub 3} films. The bandgap of Ga{sub 2}O{sub 3} films without W-incorporation was {approx}5 eV. Red-shift in the bandgap was noted with increasing W-concentration indicating the electronic structure changes in W-Ga{sub 2}O{sub 3} films. A functional relationship between W-concentration and optical property is discussed.

OSTI ID:
22162919
Journal Information:
Applied Physics Letters, Vol. 102, Issue 19; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English