Laser-plasma source parameters for Kr, Gd, and Tb ions at 6.6 nm

Journal Article · Mon Apr 22 00:00:00 EDT 2013 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4802789· OSTI ID:22162863

Masnavi, Majid; Szilagyi, John; Parchamy, Homaira; Richardson, Martin C. ^[1]

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1. The Townes Laser Institute, College of Optics and Photonics, University of Central Florida, 4000 Central Florida Blvd., Orlando, Florida 32816 (United States)

There is increasing interest in extreme-ultraviolet (EUV) laser-based lamps for sub-10-nm lithography operating in the region of 6.6 nm. A collisional-radiative model is developed as a post-processor of a hydrodynamic code to investigate emission from resonance lines in Kr, Gd, and Tb ions under conditions typical for mass-limited EUV sources. The analysis reveals that maximum conversion efficiencies of Kr occur at 5 Multiplication-Sign 10{sup 10}W/cm{sup 2}, while for Gd and Tb it was Asymptotically-Equal-To 0.9%/2{pi}sr for laser intensities of (2-5) Multiplication-Sign 10{sup 12}W/cm{sup 2}.

• OSTI ID: 22162863
• Journal Information: Applied Physics Letters, Vol. 102, Issue 16; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
EFFICIENCY
EMISSION
EXTREME ULTRAVIOLET RADIATION
GADOLINIUM IONS
KRYPTON IONS
LASER-PRODUCED PLASMA
LIGHT TRANSMISSION
MASS
PLASMA SIMULATION
RESONANCE
TERBIUM
TERBIUM IONS