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Title: Non-conducting interfaces of LaAlO{sub 3}/SrTiO{sub 3} produced in sputter deposition: The role of stoichiometry

We have investigated the properties of interfaces between LaAlO{sub 3} films grown on SrTiO{sub 3} substrates singly terminated by TiO{sub 2}. We used RF sputtering in a high-pressure oxygen atmosphere. The films are smooth, with flat surfaces. Transmission electron microscopy shows sharp and continuous interfaces with some slight intermixing. The elemental ratio of La to Al, measured by the energy dispersive X-ray technique, is found to be 1.07. Importantly, we find these interfaces to be non-conducting, indicating that the sputtered interface is not electronically reconstructed in the way reported for films grown by pulsed laser deposition because of the different interplays among stoichiometry, mixing, and oxygen vacancies.
Authors:
; ; ;  [1] ; ;  [2] ;  [3]
  1. Kamerlingh Onnes Laboratorium, Leiden University, Leiden (Netherlands)
  2. National Centre for High Resolution Microscopy, Kavli Institute for Nanoscience, Delft Technical University, Lorentzweg 1, 2628 CJ Delft (Netherlands)
  3. Faculty of Science and Technology and MESA Institute for Nanotechnology, University of Twente, 7500 AE Enschede (Netherlands)
Publication Date:
OSTI Identifier:
22162807
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 102; Journal Issue: 12; Other Information: (c) 2013 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINATES; ATMOSPHERES; ENERGY BEAM DEPOSITION; FILMS; INTERFACES; LANTHANUM COMPOUNDS; LASER RADIATION; MIXING; OXYGEN; PULSED IRRADIATION; SPUTTERING; STOICHIOMETRY; STRONTIUM TITANATES; SUBSTRATES; SURFACES; TITANIUM OXIDES; TRANSMISSION ELECTRON MICROSCOPY; VACANCIES; X RADIATION