Determination of effective work function of Pr{sub 0.7}Ca{sub 0.3}MnO{sub 3} and Pt films on ZrO{sub x} using terraced-oxide method

Journal Article · Mon Jul 15 00:00:00 EDT 2013 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4816004· OSTI ID:22122824

Lei, Bi; Pandey, Sumeet C.; Ramaswamy, Nirmal ^[1]

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1. Micron Technology, Inc., Boise, Idaho 83707 (United States)

We have determined the effective work function ({Phi}{sub m,eff}) of thin-film sputter-deposited Pr{sub 0.7}Ca{sub 0.3}MnO{sub 3} (PCMO) on atomic-layer-deposited ZrO{sub x}. Pt/PCMO/ZrO{sub x}/SiO{sub 2}/Si and Pt/ZrO{sub x}/SiO{sub 2}/Si metal-oxide-semiconductor (MOS) capacitors were fabricated. The {Phi}{sub m,eff} were extracted from capacitance-voltage curves of the MOS capacitors by using flat-band voltage versus effective-oxide-thickness plots. PCMO was crystallized using a high-temperature anneal step and crystallinity was confirmed by x-ray diffraction and transmission electron microscopy. {Phi}{sub m,eff} of polycrystalline PCMO and Pt on ZrO{sub x} was determined to be 5.43 eV and 5.40 eV, respectively. The significantly higher {Phi}{sub m,eff} of PCMO is attributed to the presence of oxygen-rich PCMO(002)/ZrO{sub x} interfaces as indicated by our density-functional-theory calculations.

• OSTI ID: 22122824
• Journal Information: Applied Physics Letters, Vol. 103, Issue 3; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANNEALING
CALCIUM COMPOUNDS
CAPACITANCE
CRYSTALLIZATION
DENSITY FUNCTIONAL METHOD
INTERFACES
LAYERS
MANGANATES
PLATINUM
POLYCRYSTALS
PRASEODYMIUM COMPOUNDS
SEMICONDUCTOR MATERIALS
SILICON OXIDES
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY
WORK FUNCTIONS
X-RAY DIFFRACTION
ZIRCONIUM OXIDES