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Title: Epitaxial V{sub 0.6}W{sub 0.4}N/MgO(001): Evidence for ordering on the cation sublattice

V{sub 0.6}W{sub 0.4}N alloys are grown on MgO(001) by ultrahigh vacuum reactive magnetron sputtering from V and W targets in 10 mTorr pure-N{sub 2} atmospheres at temperatures T{sub s} ranging from 600 to 900 Degree-Sign C. Based on x-ray diffraction and transmission electron microscopy results, all films have the B1-NaCl crystal structure and grow with a cube-on-cube epitaxial relationship to the substrate, (001){sub VWN} Double-Vertical-Line (001){sub MgO} and [100]{sub VWN} Double-Vertical-Line [100]{sub MgO}. Rutherford backscattering spectrometry analyses show that the N content in V{sub 0.6}W{sub 0.4}N{sub x} alloys decreases with increasing T{sub s} from overstoichiometric with x = 1.13 at 600 Degree-Sign C, to approximately stoichiometric with x = 1.08 at 700 Degree-Sign C, to understoichiometric at 800 Degree-Sign C (x = 0.80) and 900 Degree-Sign C (x = 0.75). High-resolution scanning transmission electron microscopy, Z-contrast, and selected-area electron diffraction investigations of V{sub 0.6}W{sub 0.4}N(001) alloys grown at 600 and 700 Degree-Sign C reveal the onset of W ordering on adjacent 111 planes of the metal sublattice; no ordering is observed for understoichiometric films grown at higher temperatures.
Authors:
; ; ;  [1] ; ;  [1] ;  [2]
  1. Thin Film Physics Division, Department of Physics (IFM), Linkoeping University, SE-58183 Linkoeping (Sweden)
  2. (United States)
Publication Date:
OSTI Identifier:
22121649
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 31; Journal Issue: 4; Other Information: (c) 2013 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; CATIONS; CUBIC LATTICES; DEPOSITION; ELECTRON DIFFRACTION; EPITAXY; FILMS; LAYERS; MAGNESIUM OXIDES; MAGNETRONS; NITROGEN ADDITIONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTERING; TEMPERATURE RANGE 0400-1000 K; TEMPERATURE RANGE 1000-4000 K; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN ALLOYS; VANADIUM ALLOYS; X-RAY DIFFRACTION