Note: Helical nanobelt force sensors

Journal Article · Sat Dec 15 00:00:00 EST 2012 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4769757· OSTI ID:22094043

Hwang, G. ^[1]; Hashimoto, H. ^[2]

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1. Laboratory for Photonics and Nanostructures, Centre National de la Recherche Scientifique, Marcoussis 91460 (France)
2. Department of EECE, Chuo University 1-13-27 Kasuga, Bunkyo-ku, Tokyo (Japan)

We present the fabrication and characterization of helical nanobelt force sensors. These self-sensing force sensors are based on the giant piezoresistivity of helical nanobelts. The three-dimensional helical nanobelts are self-formed from 27 nm-thick n-type InGaAs/GaAs bilayers using rolled-up techniques, and assembled onto electrodes on a micropipette using nanorobotic manipulations. The helical nanobelt force sensors can be calibrated using a calibrated atomic force microscope cantilever system under scanning electron microscope. Thanks to their giant piezoresistance coefficient (515 Multiplication-Sign 10{sup -10} Pa{sup -1}), low stiffness (0.03125 N/m), large-displacement capability ({approx}10 {mu}m), and good fatigue resistance, they are well suited to function as stand-alone, compact ({approx}20 {mu}m without the plug-in support), light ({approx}5 g including the plug-in support), versatile and large range ({approx}{mu}N) and high resolution ({approx}nN) force sensors.

• OSTI ID: 22094043
• Journal Information: Review of Scientific Instruments, Vol. 83, Issue 12; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ATOMIC FORCE MICROSCOPY
CALIBRATION
ELASTICITY
ELECTRODES
FLEXIBILITY
GALLIUM ARSENIDES
HETEROJUNCTIONS
INDIUM ARSENIDES
LAYERS
NANOSTRUCTURES
RESOLUTION
SCANNING ELECTRON MICROSCOPY
SEMICONDUCTOR MATERIALS
SENSORS
VISIBLE RADIATION