Fourier transform infrared absorption spectroscopy characterization of gaseous atmospheric pressure plasmas with 2 mm spatial resolution

Journal Article · Mon Oct 15 00:00:00 EDT 2012 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4761925· OSTI ID:22093787

Laroche, G. ^[1]; Vallade, J. ^[2]; Bazinette, R.; Hernandez, E.; Hernandez, G.; Massines, F. ^[2]; Nijnatten, P. van ^[3]

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1. Laboratoire d'Ingenierie de Surface, Centre de Recherche sur les Materiaux Avances, Departement de genie des mines, de la metallurgie et des materiaux, Universite Laval, 1065, avenue de la Medecine, Quebec G1V 0A6 (Canada)
2. Laboratoire Procedes, Materiaux et Energie Solaire, PROMES, CNRS, Technosud, Rambla de la Thermodynamique, F-66100 Perpignan (France)
3. OMT Solutions bv, High Tech Campus 9, 5656AE Eindhoven (Netherlands)

This paper describes an optical setup built to record Fourier transform infrared (FTIR) absorption spectra in an atmospheric pressure plasma with a spatial resolution of 2 mm. The overall system consisted of three basic parts: (1) optical components located within the FTIR sample compartment, making it possible to define the size of the infrared beam (2 mm Multiplication-Sign 2 mm over a path length of 50 mm) imaged at the site of the plasma by (2) an optical interface positioned between the spectrometer and the plasma reactor. Once through the plasma region, (3) a retro-reflector module, located behind the plasma reactor, redirected the infrared beam coincident to the incident path up to a 45 Degree-Sign beamsplitter to reflect the beam toward a narrow-band mercury-cadmium-telluride detector. The antireflective plasma-coating experiments performed with ammonia and silane demonstrated that it was possible to quantify 42 and 2 ppm of these species in argon, respectively. In the case of ammonia, this was approximately three times less than this gas concentration typically used in plasma coating experiments while the silane limit of quantification was 35 times lower. Moreover, 70% of the incoming infrared radiation was focused within a 2 mm width at the site of the plasma, in reasonable agreement with the expected spatial resolution. The possibility of reaching this spatial resolution thus enabled us to measure the gaseous precursor consumption as a function of their residence time in the plasma.

• OSTI ID: 22093787
• Journal Information: Review of Scientific Instruments, Vol. 83, Issue 10; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ABSORPTION SPECTRA
ABSORPTION SPECTROSCOPY
AMMONIA
ANTIREFLECTION COATINGS
ARGON
ATMOSPHERIC PRESSURE
CDTE SEMICONDUCTOR DETECTORS
FOURIER TRANSFORM SPECTROMETERS
INFRARED RADIATION
INFRARED SPECTRA
INTERFACES
PLASMA
PRECURSOR
SPATIAL RESOLUTION
SPECTROMETERS