Angle-resolved environmental X-ray photoelectron spectroscopy: A new laboratory setup for photoemission studies at pressures up to 0.4 Torr

Journal Article · Sat Sep 15 00:00:00 EDT 2012 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4754127· OSTI ID:22093727

Mangolini, F.; Wabiszewski, G. E.; Egberts, P. ^[1]; Ahlund, J.; Backlund, K.; Karlsson, P. G. ^[2]; Adiga, V. P.; Streller, F. ^[3]; Wannberg, B. ^[2]; Carpick, R. W. ^[1]

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1. Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, 220 S. 33rd Street, Philadelphia, Pennsylvania 19104 (United States)
2. VG Scienta AB, Box 15120, SE-750 15 Uppsala (Sweden)
3. Department of Materials Science and Engineering, University of Pennsylvania, 3231 Walnut Street, Philadelphia, Pennsylvania 19104 (United States)

The paper presents the development and demonstrates the capabilities of a new laboratory-based environmental X-ray photoelectron spectroscopy system incorporating an electrostatic lens and able to acquire spectra up to 0.4 Torr. The incorporation of a two-dimensional detector provides imaging capabilities and allows the acquisition of angle-resolved data in parallel mode over an angular range of 14 Degree-Sign without tilting the sample. The sensitivity and energy resolution of the spectrometer have been investigated by analyzing a standard Ag foil both under high vacuum (10{sup -8} Torr) conditions and at elevated pressures of N{sub 2} (0.4 Torr). The possibility of acquiring angle-resolved data at different pressures has been demonstrated by analyzing a silicon/silicon dioxide (Si/SiO{sub 2}) sample. The collected angle-resolved spectra could be effectively used for the determination of the thickness of the native silicon oxide layer.

• OSTI ID: 22093727
• Journal Information: Review of Scientific Instruments, Vol. 83, Issue 9; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ELECTROSTATIC LENSES
ENERGY RESOLUTION
FOILS
LAYERS
OPTICS
PHOTOEMISSION
SILICON
SILICON OXIDES
SPECTRA
SPECTROMETERS
THICKNESS
TWO-DIMENSIONAL CALCULATIONS
X RADIATION
X-RAY PHOTOELECTRON SPECTROSCOPY