Surface composition of BaTiO{sub 3}/SrTiO{sub 3}(001) films grown by atomic oxygen plasma assisted molecular beam epitaxy

Journal Article · Sat Dec 01 00:00:00 EST 2012 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4768469· OSTI ID:22089611

Barbier, A.; Stanescu, D.; Jegou, P.; Magnan, H. ^[1]; Mocuta, C. ^[2]; Jedrecy, N. ^[3]

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1. CEA, IRAMIS, SPCSI, F-91191 Gif-sur-Yvette (France)
2. Synchrotron SOLEIL, L'Orme des Merisiers Saint-Aubin, BP 48, F-91192 Gif-sur-Yvette Cedex (France)
3. Institut des Nano Sciences de Paris, UPMC-Sorbonne Universites, CNRS-UMR7588, 75005 Paris (France)

We have investigated the growth of BaTiO{sub 3} thin films deposited on pure and 1% Nb-doped SrTiO{sub 3}(001) single crystals using atomic oxygen assisted molecular beam epitaxy and dedicated Ba and Ti Knudsen cells. Thicknesses up to 30 nm were investigated for various layer compositions. We demonstrate 2D growth and epitaxial single crystalline BaTiO{sub 3} layers up to 10 nm before additional 3D features appear; lattice parameter relaxation occurs during the first few nanometers and is completed at {approx}10 nm. The presence of a Ba oxide rich top layer that probably favors 2D growth is evidenced for well crystallized layers. We show that the Ba oxide rich top layer can be removed by chemical etching. The present work stresses the importance of stoichiometry and surface composition of BaTiO{sub 3} layers, especially in view of their integration in devices.

• OSTI ID: 22089611
• Journal Information: Journal of Applied Physics, Vol. 112, Issue 11; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM COMPOUNDS
CRYSTALLIZATION
DOPED MATERIALS
ETCHING
FERROELECTRIC MATERIALS
LATTICE PARAMETERS
LAYERS
MOLECULAR BEAM EPITAXY
MONOCRYSTALS
NIOBIUM ADDITIONS
STRONTIUM TITANATES
SURFACES
THICKNESS
THIN FILMS
TITANATES