Determination of {sup 16}O and {sup 18}O sensitivity factors and charge-exchange processes in low-energy ion scattering
- Department of Materials, Imperial College, SW7 2AZ London (United Kingdom)
Quantitative analysis in low-energy ion scattering (LEIS) requires an understanding of the charge-exchange processes to estimate the elemental sensitivity factors. In this work, the neutralization of He{sup +} scattered by {sup 18}O-exchanged silica at energies between 0.6 and 7 keV was studied. The process is dominated by Auger neutralization for E{sub i} < 0.8 keV. An additional mechanism starts above the reionization threshold. This collision-induced neutralization becomes the dominant mechanism for E{sub i} > 2 keV. The ion fractions P{sup +} were determined for Si and O using the characteristic velocity method to quantify the surface density. The {sup 18}O/{sup 16}O sensitivity ratio indicates an 18% higher sensitivity for the heavier O isotope.
- OSTI ID:
- 22080477
- Journal Information:
- Applied Physics Letters, Vol. 101, Issue 15; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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