Circular multilayer zone plate for high-energy x-ray nano-imaging
Journal Article
·
· Review of Scientific Instruments
- Graduate School of Material Science, University of Hyogo, Kamigori, Ako, Hyogo 678-1297 (Japan)
- NTT Advanced Technology Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0124 (Japan)
A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi{sub 2} and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern.
- OSTI ID:
- 22063777
- Journal Information:
- Review of Scientific Instruments, Vol. 83, Issue 1; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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