Secondary ion counting for surface-sensitive chemical analysis of organic compounds using time-of-flight secondary ion mass spectroscopy with cluster ion impact ionization

Journal Article · Tue Mar 15 00:00:00 EDT 2011 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.3541799· OSTI ID:22062264

Hirata, K ^[1]; Saitoh, Y; Chiba, A; Yamada, K ^[2]; Takahashi, Y; Narumi, K ^[3]

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1. National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565 (Japan)
2. Takasaki Advanced Radiation Research Institute (TARRI), Japan Atomic Energy Agency (JAEA), Takasaki Gumma 370-1292 (Japan)
3. Advanced Science Research Center, Japan Atomic Energy Agency (JAEA), Takasaki, Gumma 370-1292 (Japan)

We report suitable secondary ion (SI) counting for surface-sensitive chemical analysis of organic compounds using time-of-flight (TOF) SI mass spectroscopy, based on considerably higher emission yields of SIs induced by cluster ion impact ionization. A SI counting system for a TOF SI mass spectrometer was developed using a fast digital storage oscilloscope, which allows us to perform various types of analysis as all the signal pulses constituting TOF SI mass spectra can be recorded digitally in the system. Effects of the SI counting strategy on SI mass spectra were investigated for C{sub 8} and C{sub 60} cluster ion impacts on an organically contaminated silicon wafer and on polytetrafluoroethylene targets by comparing TOF SI mass spectra obtained from the same recorded signals with different SI counting procedures. Our results show that the use of a counting system, which can cope with high SI yields, is necessary for quantitative analysis of SI mass spectra obtained under high SI yield per impact conditions, including the case of cluster ion impacts on organic compounds.

• OSTI ID: 22062264
• Journal Information: Review of Scientific Instruments, Vol. 82, Issue 3; Other Information: (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
CHEMICAL ANALYSIS
FULLERENES
ION PAIRS
IONIZATION
MASS SPECTRA
MASS SPECTROMETERS
MASS SPECTROSCOPY
OSCILLOGRAPHS
POLYTETRAFLUOROETHYLENE
PULSES
SILICON
SURFACES
TIME-OF-FLIGHT METHOD