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Title: Lithium phosphorus oxynitride solid-state thin-film electrolyte deposited and modified by bias sputtering and low temperature annealing

Abstract

Amorphous lithium phosphorus oxynitride (LiPON) solid-state thin-film electrolyte has been deposited and characterized. The thin films were prepared by rf magnetron sputtering under various substrate biases. By fabricating under different substrate biases and applying low temperature annealing (473 K), the properties of the LiPON thin-film electrolytes and the electrolyte/cathode interfaces were modified. The ionic conductivity as high as 9.4x10{sup -4} S m{sup -1} can be obtained by depositing at optimal bias. The performances of the consequently fabricated SnO{sub 2}/LiPON/LiMn{sub 2}O{sub 4} all-solid-state lithium ion thin-film batteries were improved using the bias sputtering technique, due to the enhanced the ionic conductivity and uniform interface.

Authors:
; ; ; ; ; ;  [1]
  1. Department of Materials Science and Engineering, Feng Chia University, 100 Wen Hua Road, Taichung, Taiwan (China)
Publication Date:
OSTI Identifier:
22053724
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Volume: 28; Journal Issue: 4; Other Information: (c) 2010 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1553-1813
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ANNEALING; CATHODES; DEPOSITION; ELECTROLYTES; IONIC CONDUCTIVITY; LITHIUM COMPOUNDS; LITHIUM IONS; MAGNETRONS; PHOSPHORUS NITRIDES; SOLIDS; SPUTTERING; TEMPERATURE RANGE 0065-0273 K; THIN FILMS; TIN OXIDES

Citation Formats

Chiu, K -F, Chen, C C, Lin, K M, Lo, C C, Lin, H C, Ho, W -H, Jiang, C S, Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan, and Taiwan Textile Research Institute, Taipei County, Taiwan. Lithium phosphorus oxynitride solid-state thin-film electrolyte deposited and modified by bias sputtering and low temperature annealing. United States: N. p., 2010. Web. doi:10.1116/1.3435330.
Chiu, K -F, Chen, C C, Lin, K M, Lo, C C, Lin, H C, Ho, W -H, Jiang, C S, Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan, & Taiwan Textile Research Institute, Taipei County, Taiwan. Lithium phosphorus oxynitride solid-state thin-film electrolyte deposited and modified by bias sputtering and low temperature annealing. United States. https://doi.org/10.1116/1.3435330
Chiu, K -F, Chen, C C, Lin, K M, Lo, C C, Lin, H C, Ho, W -H, Jiang, C S, Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan, and Taiwan Textile Research Institute, Taipei County, Taiwan. 2010. "Lithium phosphorus oxynitride solid-state thin-film electrolyte deposited and modified by bias sputtering and low temperature annealing". United States. https://doi.org/10.1116/1.3435330.
@article{osti_22053724,
title = {Lithium phosphorus oxynitride solid-state thin-film electrolyte deposited and modified by bias sputtering and low temperature annealing},
author = {Chiu, K -F and Chen, C C and Lin, K M and Lo, C C and Lin, H C and Ho, W -H and Jiang, C S and Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan and Taiwan Textile Research Institute, Taipei County, Taiwan},
abstractNote = {Amorphous lithium phosphorus oxynitride (LiPON) solid-state thin-film electrolyte has been deposited and characterized. The thin films were prepared by rf magnetron sputtering under various substrate biases. By fabricating under different substrate biases and applying low temperature annealing (473 K), the properties of the LiPON thin-film electrolytes and the electrolyte/cathode interfaces were modified. The ionic conductivity as high as 9.4x10{sup -4} S m{sup -1} can be obtained by depositing at optimal bias. The performances of the consequently fabricated SnO{sub 2}/LiPON/LiMn{sub 2}O{sub 4} all-solid-state lithium ion thin-film batteries were improved using the bias sputtering technique, due to the enhanced the ionic conductivity and uniform interface.},
doi = {10.1116/1.3435330},
url = {https://www.osti.gov/biblio/22053724}, journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
issn = {1553-1813},
number = 4,
volume = 28,
place = {United States},
year = {Thu Jul 15 00:00:00 EDT 2010},
month = {Thu Jul 15 00:00:00 EDT 2010}
}