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Title: Sputter deposition of Al-doped ZnO films with various incident angles

Abstract

Al-doped ZnO (AZO) films were sputter deposited on glass substrates heated at 200 degree sign C under incident angles of sputtered particles at 0 degree sign (incidence normal to substrate), 20 deg., 40 deg., 60 deg., and 80 deg. In the case of normal incidence, x-ray diffraction pole figures show a strong [001] preferred orientation normal to the film surface. In contrast, in the case wherein the incident angles were higher than 60 degree sign , the [001] orientation inclined by 25 deg. - 35 deg. toward the direction of sputtered particles. Transmission electron microscopy revealed that the tilt angle of the [001] orientation increased with increasing angle of the incident sputtered particles, whereas the columnar structure did not show any sign of inclination with respect to the substrate plane.

Authors:
; ; ; ;  [1]
  1. Graduate School of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558 (Japan)
Publication Date:
OSTI Identifier:
22053537
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Volume: 27; Journal Issue: 5; Other Information: (c) 2009 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1553-1813
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM; CRYSTAL STRUCTURE; DEPOSITION; DOPED MATERIALS; GLASS; GRAIN ORIENTATION; SEMICONDUCTOR MATERIALS; SPUTTERING; SUBSTRATES; SURFACES; TEXTURE; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION; ZINC OXIDES

Citation Formats

Sato, Yasushi, Yanagisawa, Kei, Oka, Nobuto, Nakamura, Shin-ichi, Shigesato, Yuzo, Center for Instrumental Analysis, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, and Graduate School of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558. Sputter deposition of Al-doped ZnO films with various incident angles. United States: N. p., 2009. Web. doi:10.1116/1.3186618.
Sato, Yasushi, Yanagisawa, Kei, Oka, Nobuto, Nakamura, Shin-ichi, Shigesato, Yuzo, Center for Instrumental Analysis, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, & Graduate School of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558. Sputter deposition of Al-doped ZnO films with various incident angles. United States. https://doi.org/10.1116/1.3186618
Sato, Yasushi, Yanagisawa, Kei, Oka, Nobuto, Nakamura, Shin-ichi, Shigesato, Yuzo, Center for Instrumental Analysis, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, and Graduate School of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558. 2009. "Sputter deposition of Al-doped ZnO films with various incident angles". United States. https://doi.org/10.1116/1.3186618.
@article{osti_22053537,
title = {Sputter deposition of Al-doped ZnO films with various incident angles},
author = {Sato, Yasushi and Yanagisawa, Kei and Oka, Nobuto and Nakamura, Shin-ichi and Shigesato, Yuzo and Center for Instrumental Analysis, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558 and Graduate School of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558},
abstractNote = {Al-doped ZnO (AZO) films were sputter deposited on glass substrates heated at 200 degree sign C under incident angles of sputtered particles at 0 degree sign (incidence normal to substrate), 20 deg., 40 deg., 60 deg., and 80 deg. In the case of normal incidence, x-ray diffraction pole figures show a strong [001] preferred orientation normal to the film surface. In contrast, in the case wherein the incident angles were higher than 60 degree sign , the [001] orientation inclined by 25 deg. - 35 deg. toward the direction of sputtered particles. Transmission electron microscopy revealed that the tilt angle of the [001] orientation increased with increasing angle of the incident sputtered particles, whereas the columnar structure did not show any sign of inclination with respect to the substrate plane.},
doi = {10.1116/1.3186618},
url = {https://www.osti.gov/biblio/22053537}, journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
issn = {1553-1813},
number = 5,
volume = 27,
place = {United States},
year = {Tue Sep 15 00:00:00 EDT 2009},
month = {Tue Sep 15 00:00:00 EDT 2009}
}