Sputter deposition of Al-doped ZnO films with various incident angles
Abstract
Al-doped ZnO (AZO) films were sputter deposited on glass substrates heated at 200 degree sign C under incident angles of sputtered particles at 0 degree sign (incidence normal to substrate), 20 deg., 40 deg., 60 deg., and 80 deg. In the case of normal incidence, x-ray diffraction pole figures show a strong [001] preferred orientation normal to the film surface. In contrast, in the case wherein the incident angles were higher than 60 degree sign , the [001] orientation inclined by 25 deg. - 35 deg. toward the direction of sputtered particles. Transmission electron microscopy revealed that the tilt angle of the [001] orientation increased with increasing angle of the incident sputtered particles, whereas the columnar structure did not show any sign of inclination with respect to the substrate plane.
- Authors:
-
- Graduate School of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558 (Japan)
- Publication Date:
- OSTI Identifier:
- 22053537
- Resource Type:
- Journal Article
- Journal Name:
- Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
- Additional Journal Information:
- Journal Volume: 27; Journal Issue: 5; Other Information: (c) 2009 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1553-1813
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM; CRYSTAL STRUCTURE; DEPOSITION; DOPED MATERIALS; GLASS; GRAIN ORIENTATION; SEMICONDUCTOR MATERIALS; SPUTTERING; SUBSTRATES; SURFACES; TEXTURE; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION; ZINC OXIDES
Citation Formats
Sato, Yasushi, Yanagisawa, Kei, Oka, Nobuto, Nakamura, Shin-ichi, Shigesato, Yuzo, Center for Instrumental Analysis, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, and Graduate School of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558. Sputter deposition of Al-doped ZnO films with various incident angles. United States: N. p., 2009.
Web. doi:10.1116/1.3186618.
Sato, Yasushi, Yanagisawa, Kei, Oka, Nobuto, Nakamura, Shin-ichi, Shigesato, Yuzo, Center for Instrumental Analysis, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, & Graduate School of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558. Sputter deposition of Al-doped ZnO films with various incident angles. United States. https://doi.org/10.1116/1.3186618
Sato, Yasushi, Yanagisawa, Kei, Oka, Nobuto, Nakamura, Shin-ichi, Shigesato, Yuzo, Center for Instrumental Analysis, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, and Graduate School of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558. 2009.
"Sputter deposition of Al-doped ZnO films with various incident angles". United States. https://doi.org/10.1116/1.3186618.
@article{osti_22053537,
title = {Sputter deposition of Al-doped ZnO films with various incident angles},
author = {Sato, Yasushi and Yanagisawa, Kei and Oka, Nobuto and Nakamura, Shin-ichi and Shigesato, Yuzo and Center for Instrumental Analysis, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558 and Graduate School of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558},
abstractNote = {Al-doped ZnO (AZO) films were sputter deposited on glass substrates heated at 200 degree sign C under incident angles of sputtered particles at 0 degree sign (incidence normal to substrate), 20 deg., 40 deg., 60 deg., and 80 deg. In the case of normal incidence, x-ray diffraction pole figures show a strong [001] preferred orientation normal to the film surface. In contrast, in the case wherein the incident angles were higher than 60 degree sign , the [001] orientation inclined by 25 deg. - 35 deg. toward the direction of sputtered particles. Transmission electron microscopy revealed that the tilt angle of the [001] orientation increased with increasing angle of the incident sputtered particles, whereas the columnar structure did not show any sign of inclination with respect to the substrate plane.},
doi = {10.1116/1.3186618},
url = {https://www.osti.gov/biblio/22053537},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
issn = {1553-1813},
number = 5,
volume = 27,
place = {United States},
year = {Tue Sep 15 00:00:00 EDT 2009},
month = {Tue Sep 15 00:00:00 EDT 2009}
}