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Title: Current integration force and displacement self-sensing method for cantilevered piezoelectric actuators

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.3244040· OSTI ID:22051132
; ; ;  [1]
  1. Department of Automatic Control and Micro-Mechatronic Systems, FEMTO-ST Institute, UMR CNRS 6174-UFC/ENSMM/UTBM, 24 rue Alain Savary, 25000 Besancon (France)

This paper presents a new method of self-sensing both of the displacement and the external applied force at the tip of piezoelectric cantilevers. Integrated electric current across piezoelectric actuators is compensated against material nonlinearities (creep, hysteresis) to provide reliable information. We propose to compensate the hysteresis by using the Prandtl-Ishlinskii static approach while an auto regressive and moving average exogenous (ARMAX) model is used to minimize the creep influence. The quasistatic estimation, electronic circuit, and aspects related to long-term charge preservations are described or referenced. As an experiment, we tested the actuator entering in contact with a fixed force sensor. An input signal of 20 V peak-to-peak (10% of maximum range) led to force self-sensing errors inferior to {+-}8%. A final discussion about method accuracy and its limitations is made.

OSTI ID:
22051132
Journal Information:
Review of Scientific Instruments, Vol. 80, Issue 12; Other Information: (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
Country of Publication:
United States
Language:
English