Sensitivity enhancement of grating interferometer based two-dimensional sensor arrays using two-wavelength readout
Abstract
Diffraction gratings integrated with microelectromechanical systems (MEMS) sensors offer displacement measurements with subnanometer sensitivity. However, the sensitivity of the interferometric readout may drop significantly based on the gap between the grating and the reference surface. A two-wavelength (2-{lambda}) readout method was previously tested using a single MEMS sensor for illustrating increased displacement measurement capability. This work demonstrates sensitivity enhancement on a sensor array with large scale parallelization ({approx}20,000 sensors). The statistical representation, which is developed to model sensitivity enhancement within a grating based sensor array, is supported by experimental results using a thermal sensor array. In the experiments, two lasers at different wavelengths (633 and 650 nm) illuminate the thermal sensor array from the backside, time-sequentially. The diffracted first order light from the array is imaged onto a single CCD camera. The target scene is reconstructed by observing the change in the first diffracted order diffraction intensity for both wavelengths. Merging of the data from two measurements with two lasers was performed by taking the larger of the two CCD measurements with respect to the reference image for each sensor. {approx}30% increase in the average sensitivity was demonstrated for a 160x120 pixel IR sensor array. Proposed architecture is also applicablemore »
- Authors:
- Publication Date:
- OSTI Identifier:
- 22036638
- Resource Type:
- Journal Article
- Journal Name:
- Applied Optics
- Additional Journal Information:
- Journal Volume: 50; Journal Issue: 19; Other Information: (c) 2011 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6935
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ATOMIC FORCE MICROSCOPY; CHARGE-COUPLED DEVICES; DIFFRACTION GRATINGS; ELECTROMECHANICS; IMAGES; INTERFEROMETERS; LASER RADIATION; MICROSTRUCTURE; READOUT SYSTEMS; SENSITIVITY; SENSORS; SURFACES; TWO-DIMENSIONAL CALCULATIONS; VISIBLE RADIATION; WAVELENGTHS
Citation Formats
Ferhanoglu, Onur, and Urey, Hakan. Sensitivity enhancement of grating interferometer based two-dimensional sensor arrays using two-wavelength readout. United States: N. p., 2011.
Web. doi:10.1364/AO.50.003289.
Ferhanoglu, Onur, & Urey, Hakan. Sensitivity enhancement of grating interferometer based two-dimensional sensor arrays using two-wavelength readout. United States. https://doi.org/10.1364/AO.50.003289
Ferhanoglu, Onur, and Urey, Hakan. 2011.
"Sensitivity enhancement of grating interferometer based two-dimensional sensor arrays using two-wavelength readout". United States. https://doi.org/10.1364/AO.50.003289.
@article{osti_22036638,
title = {Sensitivity enhancement of grating interferometer based two-dimensional sensor arrays using two-wavelength readout},
author = {Ferhanoglu, Onur and Urey, Hakan},
abstractNote = {Diffraction gratings integrated with microelectromechanical systems (MEMS) sensors offer displacement measurements with subnanometer sensitivity. However, the sensitivity of the interferometric readout may drop significantly based on the gap between the grating and the reference surface. A two-wavelength (2-{lambda}) readout method was previously tested using a single MEMS sensor for illustrating increased displacement measurement capability. This work demonstrates sensitivity enhancement on a sensor array with large scale parallelization ({approx}20,000 sensors). The statistical representation, which is developed to model sensitivity enhancement within a grating based sensor array, is supported by experimental results using a thermal sensor array. In the experiments, two lasers at different wavelengths (633 and 650 nm) illuminate the thermal sensor array from the backside, time-sequentially. The diffracted first order light from the array is imaged onto a single CCD camera. The target scene is reconstructed by observing the change in the first diffracted order diffraction intensity for both wavelengths. Merging of the data from two measurements with two lasers was performed by taking the larger of the two CCD measurements with respect to the reference image for each sensor. {approx}30% increase in the average sensitivity was demonstrated for a 160x120 pixel IR sensor array. Proposed architecture is also applicable to a variety of sensing applications, such as parallel biosensing and atomic force microscopy, for improved displacement measurements and enhanced sensitivity.},
doi = {10.1364/AO.50.003289},
url = {https://www.osti.gov/biblio/22036638},
journal = {Applied Optics},
issn = {0003-6935},
number = 19,
volume = 50,
place = {United States},
year = {Fri Jul 01 00:00:00 EDT 2011},
month = {Fri Jul 01 00:00:00 EDT 2011}
}