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Title: A pulse-modulated nonequilibrium atmospheric-pressure microwave argon plasma discharge preionized by a kilohertz excited plasma jet

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4705433· OSTI ID:22025533
; ; ;  [1]
  1. Key Laboratory of Materials Modification by Laser, Ion, Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 (China)

A pulse-modulated nonequilibrium atmospheric-pressure microwave argon surface wave plasma is generated by means of a preionization discharge with a single-electrode plasma jet driven by a power supply of 50 kHz. It is found that the electron induced Saha-like balance dominates excitation process in the plasma discharge through the electron temperature varying with the microwave input power and the applied voltage of kilohertz power supply. The microwave pulse-modulating effect on nonequilibrium characteristics of dual-frequency exciting argon surface wave plasma is studied by spectroscopic measurement of the excitation temperature and gas temperature.

OSTI ID:
22025533
Journal Information:
Applied Physics Letters, Vol. 100, Issue 17; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English