Automated markerless full field hard x-ray microscopic tomography at sub-50 nm 3-dimension spatial resolution

Journal Article · Mon Apr 02 00:00:00 EDT 2012 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3701579· OSTI ID:22025506

Jun, Wang; Yuchen, Karen Chen; Qingxi, Yuan ^[1]; Tkachuk, Andrei; Hornberger, Benjamin; Feser, Michael ^[2]; Erdonmez, Can ^[3]

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1. Photon Science Directorate, Brookhaven National Laboratory, Upton, New York 11973 (United States)
2. Xradia Inc., 4385 Hopyard Rd., Pleasanton, California 94588 (United States)
3. Sustainable Energy Technologies Department, Brookhaven National Laboratory, Upton, New York 11973 (United States)

A full field transmission x-ray microscope (TXM) has been developed and commissioned at the National Synchrotron Light Source at Brookhaven National Laboratory. The capabilities we developed in auto-tomography, local tomography, and spectroscopic imaging that overcome many of the limitations and difficulties in existing transmission x-ray microscopes are described and experimentally demonstrated. Sub-50 nm resolution in 3-dimension (3D) with markerless automated tomography has been achieved. These capabilities open up scientific opportunities in many research fields.

• OSTI ID: 22025506
• Journal Information: Applied Physics Letters, Vol. 100, Issue 14; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
BNL
HARD X RADIATION
MICROSCOPES
NSLS
SPATIAL RESOLUTION
TOMOGRAPHY
TOPOGRAPHY
X-RAY RADIOGRAPHY
X-RAY SPECTROSCOPY