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Title: XPS Study of Thermally Evaporated Ge-Sb-Te Amorphous Thin Films

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.3653649· OSTI ID:21612342
; ;  [1]
  1. Semiconductors Laboratory, Department of Physics, Guru Nanak Dev University, Amritsar-143005 (India)

Amorphous thin films were prepared from the bulk composition of Ge{sub 22}Sb{sub 22}Te{sub 56}(GST) alloy by thermal evaporation in good vacuum condition. The amorphous nature of as-deposited films was checked with x-ray diffraction (XRD) studies. X-ray photoelectron spectroscopy (XPS) has been used to determine the binding energies of the core electrons in amorphous thin GST films. In XPS, we performed the survey scan from the binding energy (BE) range from 0-1100 eV and core level spectra of Ge 3d, Sb 3d and Te 3d.

OSTI ID:
21612342
Journal Information:
AIP Conference Proceedings, Vol. 1393, Issue 1; Conference: ICACNM-2011: International conference on advances in condensed and nano materials, Chandigarh (India), 23-26 Feb 2011; Other Information: DOI: 10.1063/1.3653649; (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
Country of Publication:
United States
Language:
English