Refractive Optics for Hard X-ray Transmission Microscopy

Journal Article · Fri Sep 09 00:00:00 EDT 2011 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3625341· OSTI ID:21608284

Simon, M; Last, A; Mohr, J; Nazmov, V; Reznikova, E ^[1]; Ahrens, G; Voigt, A ^[2]

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1. Institute for Microstructure Technology, Karlsruhe Institute of Technology Kaiserstrasse 12, 76131 Karlsruhe (Germany)
2. Microresist Technology, Koepenikerstrasse 325, 12555 Berlin (Germany)

For hard x-ray transmission microscopy at photon energies higher than 15 keV we design refractive condenser and imaging elements to be used with synchrotron light sources as well as with x-ray tube sources. The condenser lenses are optimized for low x-ray attenuation--resulting in apertures greater than 1 mm--and homogeneous intensity distribution on the detector plane, whereas the imaging enables high-resolution (<100 nm) full-field imaging. To obtain high image quality at reasonable exposure times, custom-tailored matched pairs of condenser and imaging lenses are being developed. The imaging lenses (compound refractive lenses, CRLs) are made of SU-8 negative resist by deep x-ray lithography. SU-8 shows high radiation stability. The fabrication technique enables high-quality lens structures regarding surface roughness and arrangement precision with arbitrary 2D geometry. To provide point foci, crossed pairs of lenses are used. Condenser lenses have been made utilizing deep x-ray lithographic patterning of thick SU-8 layers, too, whereas in this case, the aperture is limited due to process restrictions. Thus, in terms of large apertures, condenser lenses made of structured and rolled polyimide film are more attractive. Both condenser types, x-ray mosaic lenses and rolled x-ray prism lenses (RXPLs), are considered to be implemented into a microscope setup. The x-ray optical elements mentioned above are characterized with synchrotron radiation and x-ray laboratory sources, respectively.

• OSTI ID: 21608284
• Journal Information: AIP Conference Proceedings, Vol. 1365, Issue 1; Conference: 10. international conference on X-ray microscopy, Chicago, IL (United States), 15-20 Aug 2010; Other Information: DOI: 10.1063/1.3625341; (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
07 ISOTOPES AND RADIATION SOURCES
APERTURES
ATTENUATION
BEAM OPTICS
BEAM TRANSPORT
DESIGN
HARD X RADIATION
IMAGES
KEV RANGE
LAYERS
LENSES
LIGHT SOURCES
MICROSCOPY
PHOTONS
SYNCHROTRON RADIATION
X-RAY SOURCES
X-RAY TUBES
BOSONS
BREMSSTRAHLUNG
ELECTROMAGNETIC RADIATION
ELECTRON TUBES
ELEMENTARY PARTICLES
ENERGY RANGE
EQUIPMENT
IONIZING RADIATIONS
MASSLESS PARTICLES
OPENINGS
RADIATION SOURCES
RADIATIONS
X RADIATION
X-RAY EQUIPMENT