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Title: The crystallinity and mechanical properties of indium tin oxide coatings on polymer substrates

Abstract

We present the relationship between the microstructure and mechanical strength of indium tin oxide (ITO) on flexible substrates. With varying thickness (h{sub f}), ITO is deposited on polyethylene terephthalate (PET) by dc magnetron sputtering. The microstructure of ITO is controlled by substrate surface conditions and sputtering parameters. The maximum substrate temperature during deposition is limited to 80 deg. C due to the low glass transition temperature (T{sub g}) of PET. The crystallinity and surface roughness (R{sub rms}) are analyzed by high resolution x-ray diffraction, high resolution transmission electron microscopy, and AFM. The crack resistance of ITO is evaluated by uniaxial tension test. The experimental results reveal that, at a fixed h{sub f}, the degree and quality of crystallinity of ITO are highly improved by increasing sputtering power and the substrate temperature. As the crystallinity is improved, the ratio of preferred growth orientations of (222) to (400) is increased and the degree of peak shifts to lower 2{theta} is decreased. They indicate that the crystallinity is improved as the lattice damage is reduced and film density is increased. The tension test results confirm that, up to a certain h{sub f}, the strength of ITO can be significantly enhanced by improving themore » microstructures.« less

Authors:
; ;  [1]
  1. Department of Materials Science and Engineering, Yonsei University, Seoul 120-749 (Korea, Republic of)
Publication Date:
OSTI Identifier:
21538098
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 109; Journal Issue: 4; Other Information: DOI: 10.1063/1.3556452; (c) 2011 American Institute of Physics; Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ATOMIC FORCE MICROSCOPY; COATINGS; CRYSTAL STRUCTURE; GLASS; INDIUM OXIDES; MAGNETRONS; MECHANICAL PROPERTIES; MICROSTRUCTURE; POLYESTERS; ROUGHNESS; SPUTTERING; SUBSTRATES; SURFACE COATING; SURFACES; THICKNESS; TIN OXIDES; TRANSITION TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION; CHALCOGENIDES; COHERENT SCATTERING; DEPOSITION; DIFFRACTION; DIMENSIONS; ELECTRON MICROSCOPY; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; ESTERS; INDIUM COMPOUNDS; MICROSCOPY; MICROWAVE EQUIPMENT; MICROWAVE TUBES; ORGANIC COMPOUNDS; ORGANIC POLYMERS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; POLYMERS; SCATTERING; SURFACE PROPERTIES; THERMODYNAMIC PROPERTIES; TIN COMPOUNDS

Citation Formats

Kim, Eun-Hye, Yang, Chan-Woo, and Park, Jin-Woo. The crystallinity and mechanical properties of indium tin oxide coatings on polymer substrates. United States: N. p., 2011. Web. doi:10.1063/1.3556452.
Kim, Eun-Hye, Yang, Chan-Woo, & Park, Jin-Woo. The crystallinity and mechanical properties of indium tin oxide coatings on polymer substrates. United States. https://doi.org/10.1063/1.3556452
Kim, Eun-Hye, Yang, Chan-Woo, and Park, Jin-Woo. 2011. "The crystallinity and mechanical properties of indium tin oxide coatings on polymer substrates". United States. https://doi.org/10.1063/1.3556452.
@article{osti_21538098,
title = {The crystallinity and mechanical properties of indium tin oxide coatings on polymer substrates},
author = {Kim, Eun-Hye and Yang, Chan-Woo and Park, Jin-Woo},
abstractNote = {We present the relationship between the microstructure and mechanical strength of indium tin oxide (ITO) on flexible substrates. With varying thickness (h{sub f}), ITO is deposited on polyethylene terephthalate (PET) by dc magnetron sputtering. The microstructure of ITO is controlled by substrate surface conditions and sputtering parameters. The maximum substrate temperature during deposition is limited to 80 deg. C due to the low glass transition temperature (T{sub g}) of PET. The crystallinity and surface roughness (R{sub rms}) are analyzed by high resolution x-ray diffraction, high resolution transmission electron microscopy, and AFM. The crack resistance of ITO is evaluated by uniaxial tension test. The experimental results reveal that, at a fixed h{sub f}, the degree and quality of crystallinity of ITO are highly improved by increasing sputtering power and the substrate temperature. As the crystallinity is improved, the ratio of preferred growth orientations of (222) to (400) is increased and the degree of peak shifts to lower 2{theta} is decreased. They indicate that the crystallinity is improved as the lattice damage is reduced and film density is increased. The tension test results confirm that, up to a certain h{sub f}, the strength of ITO can be significantly enhanced by improving the microstructures.},
doi = {10.1063/1.3556452},
url = {https://www.osti.gov/biblio/21538098}, journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 4,
volume = 109,
place = {United States},
year = {Tue Feb 15 00:00:00 EST 2011},
month = {Tue Feb 15 00:00:00 EST 2011}
}