Fabrication of submicron La{sub 2-x}Sr{sub x}CuO{sub 4} intrinsic Josephson junction stacks

Journal Article · Tue Feb 01 00:00:00 EST 2011 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3544037· OSTI ID:21538085

Kubo, Yuimaru; Takano, Yoshihiko ^[1]; Takahide, Yamaguchi; Ueda, Shinya; Ishii, Satoshi; Tsuda, Shunsuke ^[1]; Tanaka, Takayoshi ^[2]; Islam, ATM Nazmul; Tanaka, Isao ^[3]

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1. Superconducting Materials Center, National Institute for Materials Science (NIMS), Tsukuba 305-0047 (Japan)
2. Material Manufacture and Engineering Station, National Institute for Materials Science (NIMS), Tsukuba 305-0047 (Japan)
3. Center for Crystal Science and Technology, University of Yamanashi, Kofu 400-8511 (Japan)

Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report success in fabricating submicron La{sub 2-x}Sr{sub x}CuO{sub 4} (LSCO) IJJ stacks carved out of single crystals. We also show a new fabrication method in which argon ion etching is performed after focused ion beam etching. As a result, we obtained an LSCO IJJ stack in which resistive multibranches appeared. It may be possible to control the number of stacked IJJs with an accuracy of a single IJJ by developing this method.

• OSTI ID: 21538085
• Journal Information: Journal of Applied Physics, Vol. 109, Issue 3; Other Information: DOI: 10.1063/1.3544037; (c) 2011 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
ARGON IONS
CUPRATES
HIGH-TC SUPERCONDUCTORS
ION BEAMS
JOSEPHSON EFFECT
JOSEPHSON JUNCTIONS
LANTHANUM COMPOUNDS
MONOCRYSTALS
QUBITS
SPUTTERING
STACKS
STRONTIUM COMPOUNDS
ZONE MELTING
ALKALINE EARTH METAL COMPOUNDS
BEAMS
CHARGED PARTICLES
COPPER COMPOUNDS
CRYSTAL GROWTH METHODS
CRYSTALS
INFORMATION
IONS
MELTING
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
QUANTUM INFORMATION
RARE EARTH COMPOUNDS
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
TYPE-II SUPERCONDUCTORS