Microdischarge extreme ultraviolet source with alkali metal vapor for surface morphology application

Journal Article · Sat Jan 01 00:00:00 EST 2011 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3528165· OSTI ID:21538001

Higashiguchi, Takeshi; Yugami, Noboru ^[1]; Terauchi, Hiromitsu; Otsuka, Takamitsu; Yamaguchi, Mami; Kikuchi, Keisuke; Yatagai, Toyohiko ^[1]; Sasaki, Wataru ^[2]; D'Arcy, Rebekah; Dunne, Padraig; O'Sullivan, Gerry ^[3]

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1. Department of Advanced Interdisciplinary Sciences, Center for Optical Research and Education (CORE), Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585 (Japan)
2. NTP Inc., Gakuen Kibanadai Nishi 1-1, Miyazaki 889-2192 (Japan)
3. School of Physics, University College Dublin, Belfield, Dublin 4 (Ireland)

We have characterized a discharge-produced potassium plasma extreme ultraviolet (XUV) source. Potassium ions produced strong broadband emission around 40 nm with a bandwidth of 8 nm (full width at half-maximum). By comparison with atomic structure calculations, the broadband emission is found to be primarily due to 3d-3p transitions in potassium ions ranging from K{sup 2+} to K{sup 4+}. The current-voltage characteristics of the microdischarge suggest that the source operates in a hollow cathode mode and consequently the emitting ions may be localized on the potassium electrode surface at the hole into the capillary. To understand the spectral behavior from the potassium plasmas we compared the spectra from the discharge-produced plasma with that from a laser-produced plasma. The spectra from the different (electric and laser) plasmas at the same electron temperature (12 eV) were almost the same. This compact capillary XUV source with a photon energy of 30 eV is a useful XUV emission source for surface morphology applications.

• OSTI ID: 21538001
• Journal Information: Journal of Applied Physics, Vol. 109, Issue 1; Other Information: DOI: 10.1063/1.3528165; (c) 2011 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

74 ATOMIC AND MOLECULAR PHYSICS
CAPILLARIES
COMPARATIVE EVALUATIONS
ELECTRON TEMPERATURE
EMISSION
ENERGY-LEVEL TRANSITIONS
EV RANGE 10-100
EXTREME ULTRAVIOLET RADIATION
GLOW DISCHARGES
HOLLOW CATHODES
ION TEMPERATURE
LASER RADIATION
LASER-PRODUCED PLASMA
LIGHT SOURCES
PHOTONS
POTASSIUM IONS
SPECTRA
SURFACES
X-RAY SOURCES
BLOOD VESSELS
BODY
BOSONS
CARDIOVASCULAR SYSTEM
CATHODES
CHARGED PARTICLES
ELECTRIC DISCHARGES
ELECTRODES
ELECTROMAGNETIC RADIATION
ELEMENTARY PARTICLES
ENERGY RANGE
EV RANGE
EVALUATION
IONS
MASSLESS PARTICLES
ORGANS
PLASMA
RADIATION SOURCES
RADIATIONS
ULTRAVIOLET RADIATION