Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas

Journal Article · Sun May 15 00:00:00 EDT 2011 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.3587108· OSTI ID:21537832

Yuan, Q H; Yin, G Q ^[1]; Xin, Y; Ning, Z Y ^[2]

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1. Key Laboratory of Atomic and Molecular Physics and Functional Materials of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070 (China)
2. School of Physical Science and Technology, Suzhou University, SuZhou 215006 (China)

The electron energy probability functions (EEPFs) were measured with increasing gas pressure in 60/13.56 MHz dual-frequency capacitively coupled plasma (DF-CCP) using compensated Langmiur electrostatic probe. The transition pressure of heating mode from collisionless to collisional heating in 60/13.56 MHz DF-CCP is found to be significantly lower than that in 13.56 MHz single-frequency CCP. As the pressure increases, the EEPFs change from bi-Maxwellian to Druyvesteyn type which is similar with that in 60 MHz single-frequency CCP. The pressure dependence of electron densities, effective electron temperatures, floating potentials, and plasma potentials in 60/13.56 MHz DF-CCP were measured and were compared with that in 60 MHz single-frequency CCP. The pressure dependence of these plasma parameters in 60/13.56 MHz DF-CCP is similar with that in 60 MHz single-frequency CCP.

• OSTI ID: 21537832
• Journal Information: Physics of Plasmas, Vol. 18, Issue 5; Other Information: DOI: 10.1063/1.3587108; (c) 2011 American Institute of Physics; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
COLLISIONAL HEATING
ELECTRON DENSITY
ELECTRON TEMPERATURE
ELECTROSTATIC PROBES
HIGH-FREQUENCY DISCHARGES
LANGMUIR PROBE
PLASMA POTENTIAL
PLASMA PRESSURE
PRESSURE DEPENDENCE
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
ELECTRIC PROBES
HEATING
HIGH-FREQUENCY HEATING
MAGNETIC-PUMPING HEATING
PLASMA HEATING
PROBES