Phase-shift effect in capacitively coupled plasmas with two radio frequency or very high frequency sources

Journal Article · Sun Aug 15 00:00:00 EDT 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3475376· OSTI ID:21476420

Xiang, Xu; Shuxia, Zhao; Yuru, Zhang; Younian, Wang ^[1]

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1. School of Physics and Optoelectronic Engineering, Dalian University of Technology, Dalian 116023 (China)

A two-dimensional fluid model was built to study the argon discharge in a capacitively coupled plasma reactor and the full set of Maxwell equations is included in the model to understand the electromagnetic effect in the capacitive discharge. Two electrical sources are applied to the top and bottom electrodes in our simulations and the phase-shift effect is focused on. We distinguish the difference of the phase-shift effect on the plasma uniformity in the traditional radio frequency discharge and in the very high frequency discharge where the standing wave effect dominates. It is found that in the discharges with frequency 13.56 MHz, the control of phase difference can less the influence of the electrostatic edge effect, and it gets the best radial uniformity of plasma density at the phase difference {pi}. But in the very high frequency discharges, the standing wave effect plays an important role. The standing wave effect can be counteracted at the phase difference 0, and be enhanced at the phase difference {pi}. The standing wave effect and the edge effect are balanced at some phase-shift value between 0 and {pi}, which is determined by discharge parameters.

• OSTI ID: 21476420
• Journal Information: Journal of Applied Physics, Vol. 108, Issue 4; Other Information: DOI: 10.1063/1.3475376; (c) 2010 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
ELECTRIC DISCHARGES
ELECTRODES
MAXWELL EQUATIONS
MHZ RANGE
PHASE SHIFT
PLASMA
PLASMA DENSITY
PLASMA SIMULATION
RADIOWAVE RADIATION
STANDING WAVES
TWO-DIMENSIONAL CALCULATIONS
DIFFERENTIAL EQUATIONS
ELECTROMAGNETIC RADIATION
ELEMENTS
EQUATIONS
FLUIDS
FREQUENCY RANGE
GASES
NONMETALS
PARTIAL DIFFERENTIAL EQUATIONS
RADIATIONS
RARE GASES
SIMULATION