Interfacial mixing and internal structure of Pt-containing nanocomposites grown by room temperature electron beam induced deposition

Journal Article · Sat May 15 00:00:00 EDT 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3428427· OSTI ID:21476251

Juntao, Li; Dunn, Kathleen A; Thiel, Bradley L ^[1]; Toth, Milos ^[2]

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1. College of Nanoscale Science and Engineering, University at Albany-SUNY, 251 Fuller Road, Albany, New York 12203 (United States)
2. FEI Company, 5350 NE Dawson Creek Drive, Hillsboro, Oregon 97124 (United States)

Material grown by room temperature electron beam induced deposition (EBID) using (CH{sub 3}){sub 3}CH{sub 3}C{sub 5}H{sub 4}Pt precursor consists of platinum nanocrystals embedded in an amorphous matrix. The crystallites are shown to intermix with the amorphous oxide on a Si substrate. The extent of intermixing scales with the electron energy density delivered to the material during growth. Dependencies on electron flux, fluence, and exposure time indicate that the intermixing process is athermal, electron-activated, and rate limited by mass transport inside the solid. Furthermore, the degree of deposit crystallinity is shown to scale with the electron flux and fluence used for EBID. We discuss mechanisms behind the observed changes in nanostructure and implications for the growth of functional materials by EBID.

• OSTI ID: 21476251
• Journal Information: Journal of Applied Physics, Vol. 107, Issue 10; Other Information: DOI: 10.1063/1.3428427; (c) 2010 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
77 NANOSCIENCE AND NANOTECHNOLOGY
AMORPHOUS STATE
COMPOSITE MATERIALS
CRYSTAL GROWTH
CRYSTALS
ELECTRON BEAMS
ENERGY BEAM DEPOSITION
ENERGY DENSITY
MASS TRANSFER
MATRIX MATERIALS
NANOSTRUCTURES
ORGANIC COMPOUNDS
PLATINUM COMPOUNDS
PRECURSOR
SILICON
SOLIDS
SUBSTRATES
TEMPERATURE RANGE 0273-0400 K
BEAMS
DEPOSITION
ELEMENTS
LEPTON BEAMS
MATERIALS
PARTICLE BEAMS
SEMIMETALS
SURFACE COATING
TEMPERATURE RANGE
TRANSITION ELEMENT COMPOUNDS