Rare-earth plasma extreme ultraviolet sources at 6.5-6.7 nm

Journal Article · Mon Sep 13 00:00:00 EDT 2010 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3490704· OSTI ID:21471003

Otsuka, Takamitsu; Higashiguchi, Takeshi; Yugami, Noboru; Yatagai, Toyohiko ^[1]; Kilbane, Deirdre; White, John; Dunne, Padraig; O'Sullivan, Gerry ^[2]; Jiang, Weihua ^[3]; Endo, Akira ^[4]

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1. Department of Advanced Interdisciplinary Sciences, Center for Optical Research and Education (CORE), Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585 (Japan)
2. School of Physics, University College Dublin, Belfield, Dublin 4 (Ireland)
3. Department of Electrical Engineering, Nagaoka University of Technology, Kami-tomiokamachi 1603-1, Nagaoka, Niigata 940-2188 (Japan)
4. Forschungszentrum Dresden, Bautzner Landstrs. 400, D-01328 Dresden (Germany)

We have demonstrated a laser-produced plasma extreme ultraviolet source operating in the 6.5-6.7 nm region based on rare-earth targets of Gd and Tb coupled with a Mo/B{sub 4}C multilayer mirror. Multiply charged ions produce strong resonance emission lines, which combine to yield an intense unresolved transition array. The spectra of these resonant lines around 6.7 nm (in-band: 6.7 nm {+-}1%) suggest that the in-band emission increases with increased plasma volume by suppressing the plasma hydrodynamic expansion loss at an electron temperature of about 50 eV, resulting in maximized emission.

• OSTI ID: 21471003
• Journal Information: Applied Physics Letters, Vol. 97, Issue 11; Other Information: DOI: 10.1063/1.3490704; (c) 2010 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BORON CARBIDES
ELECTRON TEMPERATURE
EV RANGE
EXTREME ULTRAVIOLET RADIATION
GADOLINIUM
LASER-PRODUCED PLASMA
LAYERS
MIRRORS
MOLYBDENUM
MULTICHARGED IONS
PHOTON EMISSION
PLASMA EXPANSION
PLASMA PRODUCTION
TERBIUM
BORON COMPOUNDS
CARBIDES
CARBON COMPOUNDS
CHARGED PARTICLES
ELECTROMAGNETIC RADIATION
ELEMENTS
EMISSION
ENERGY RANGE
EXPANSION
IONS
METALS
PLASMA
RADIATIONS
RARE EARTHS
REFRACTORY METALS
TRANSITION ELEMENTS
ULTRAVIOLET RADIATION