Effect of the pump intensity on the efficiency of a KrF excimer electric-discharge laser on a He-Kr-F{sub 2} mixture
- Institute of Laser Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk (Russian Federation)
- Institute of Physics, National Academy of Sciences of Ukraine, Kiev (Ukraine)
The effect of the pump parameters on the efficiency of operation of a KrF gas-discharge excimer laser on a He-Kr-F{sub 2} mixture is studied. A theoretical model of the excitation system and the kinetic processes in the plasma of this laser is developed. A pump system based on an LC inverter with a spark gap as a high-voltage switch, automatic UV preionisation, and a low-inductance discharge circuit is created. To increase the efficiency and the output energy of the KrF laser based on a He-Kr-F{sub 2} mixture, it is proposed to enhance the pump intensity to 4 MW cm{sup -3} by increasing the inductance between the LC inverter and the discharge circuit to 100 nH. An output energy of 1 J at an efficiency of 2% is achieved for the first time for the KrF laser operating on this mixture. (lasers)
- OSTI ID:
- 21470616
- Journal Information:
- Quantum Electronics (Woodbury, N.Y.), Vol. 34, Issue 10; Other Information: DOI: 10.1070/QE2004v034n10ABEH002656; ISSN 1063-7818
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
EFFICIENCY
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
EXCIMER LASERS
EXCITATION
EXCITATION SYSTEMS
HELIUM
INDUCTANCE
INVERTERS
KRYPTON
KRYPTON FLUORIDE LASERS
PLASMA
PUMPING
SPARK GAPS
SWITCHES
ULTRAVIOLET RADIATION
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
ELEMENTS
ENERGY-LEVEL TRANSITIONS
EQUIPMENT
FLUIDS
GAS LASERS
GASES
LASERS
NONMETALS
PHYSICAL PROPERTIES
RADIATIONS
RARE GASES