The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges
- Research Institute for Solid State Physics and Optics, Hungarian Academy of Sciences, P.O. Box 49, H-1525 Budapest (Hungary)
- Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44801 Bochum (Germany)
Dual-frequency capacitive discharges are used to separately control the mean ion energy, {epsilon}{sub ion}, and flux, {Gamma}{sub ion}, at the electrodes. We study the effect of secondary electrons on this separate control in argon discharges driven at 2+27 MHz at different pressures using Particle in Cell simulations. For secondary yield {gamma}{approx_equal}0, {Gamma}{sub ion} decreases as a function of the low frequency voltage amplitude due to the frequency coupling, while it increases at high {gamma} due to the effective multiplication of secondary electrons inside the sheaths. Therefore, separate control is strongly limited. {epsilon}{sub ion} increases with {gamma}, which might allow an in situ determination of {gamma}-coefficients.
- OSTI ID:
- 21466900
- Journal Information:
- Applied Physics Letters, Vol. 97, Issue 8; Other Information: DOI: 10.1063/1.3481427; (c) 2010 American Institute of Physics; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
74 ATOMIC AND MOLECULAR PHYSICS
ARGON
CHARGED-PARTICLE TRANSPORT
COMPUTERIZED SIMULATION
CONTROL
COUPLING
ELECTRIC POTENTIAL
ELECTRODES
ELECTRONS
HIGH-FREQUENCY DISCHARGES
IONS
MHZ RANGE
PLASMA
PLASMA SHEATH
PLASMA SIMULATION
RADIOWAVE RADIATION
CHARGED PARTICLES
ELECTRIC DISCHARGES
ELECTROMAGNETIC RADIATION
ELEMENTARY PARTICLES
ELEMENTS
FERMIONS
FLUIDS
FREQUENCY RANGE
GASES
LEPTONS
NONMETALS
RADIATION TRANSPORT
RADIATIONS
RARE GASES
SIMULATION