Single-layer mirrors for advanced research light sources
- GKSS Research Centre Geesthacht GmbH, Institute of Materials Research, Max-Planck-Str. 1, D-21502 Geesthacht (Germany)
- Helmholtz Zentrum Berlin / BESSY-II, Albert-Einstein-Str. 15, 12489 Berlin (Germany)
- Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin (Germany)
- Incoatec GmbH, Max-Planck-Str. 2, D-21502 Geesthacht (Germany)
- European XFEL, DESY, 22603 Hamburg (Germany)
X-ray mirrors are needed for beam guidance, beam alignment and monochromatisation at third-generation synchrotron light sources (PETRA III) and forthcoming Free-Electron Lasers (LCLS, European XFEL). Amorphous carbon coatings are currently used as total reflection mirrors at FLASH to guide the photon beam to the various beamlines. These coatings were prepared by means of magnetron sputtering. The new GKSS sputtering facility for the deposition of single and multilayer mirrors with a length of up to 1500 mm and a width of up to 120 mm is in operation. In this contribution we present the results of this new deposition system. A major advantage is that it is now possible to prepare one, two or more mirrors with similar properties over the whole deposition length. The mirror properties were investigated by means of X-ray reflectometry and interference microscopy. The performance of the mirrors is analyzed, considering X-ray reflectivity, film thickness and surface roughness. The uniformity of these properties over the whole deposition length of 1500 mm is demonstrated. The results obtained will be discussed and compared with former results.
- OSTI ID:
- 21431078
- Journal Information:
- AIP Conference Proceedings, Vol. 1234, Issue 1; Conference: SRI 2009: 10. international conference on radiation instrumentation, Melbourne (Australia), 27 Sep - 2 Oct 2009; Other Information: DOI: 10.1063/1.3463321; (c) 2010 American Institute of Physics; ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
SUPERCONDUCTIVITY AND SUPERFLUIDITY
43 PARTICLE ACCELERATORS
AMORPHOUS STATE
CARBON
COATINGS
FILMS
FREE ELECTRON LASERS
INTERFERENCE
LAYERS
LIGHT SOURCES
MAGNETRONS
MIRRORS
PHOTON BEAMS
REFLECTION
REFLECTIVITY
SPUTTERING
SURFACES
SYNCHROTRON RADIATION
SYNCHROTRONS
THICKNESS
X RADIATION
ACCELERATORS
BEAMS
BREMSSTRAHLUNG
CYCLIC ACCELERATORS
DIMENSIONS
ELECTROMAGNETIC RADIATION
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
IONIZING RADIATIONS
LASERS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NONMETALS
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
RADIATION SOURCES
RADIATIONS
SURFACE PROPERTIES