High Spatial Resolution STXM at 6.2 keV Photon Energy
- Paul Scherrer Institut, CH-5232 Villigen (Switzerland)
- Technische Universitaet Muenchen, D-85748 Garching (Germany)
- Department of Chemistry, FI-00014 University of Helsinki (Finland)
We report on a zone-doubling technique that bypasses the electron-beam lithography limitations for the production of X-ray diffractive optics and enables the fabrication of Fresnel zone plates with smaller outermost zone widths than other well-established approaches. We have applied this method to manufacture hard X-ray Fresnel zone plates with outermost zone widths of 25 and 20 nm. These lenses have been tested in scanning transmission X-ray microscopy (STXM) at energies up to 6.2 keV, producing images of test structures that demonstrate a spatial resolution of 25 nm. High spatial resolution STXM images of several biological specimens have been acquired in transmission, dark-field and differential phase contrast modes.
- OSTI ID:
- 21371773
- Journal Information:
- AIP Conference Proceedings, Vol. 1221, Issue 1; Conference: 20. international congress on X-ray optics and microanalysis, Karlsruhe (Germany), 15-18 Sep 2009; Other Information: DOI: 10.1063/1.3399261; (c) 2010 American Institute of Physics; ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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