Removal of floating dust in glow discharge using plasma jet
- National Institute for Lasers, Plasma and Radiation Physics, 077125 Bucharest (Romania)
Dust can be an inconvenient source of impurities in plasma processing reactors and in many cases it can cause damage to the plasma-treated surfaces. A technique for dust expulsion out of the trapping region in plasma is presented here, based on the wind force exerted on dust particles by a pulsed plasma jet. Its applicability is demonstrated by removing floating dust in the sheath of parallel-plate capacitive radio-frequency plasma.
- OSTI ID:
- 21367001
- Journal Information:
- Applied Physics Letters, Vol. 97, Issue 1; Other Information: DOI: 10.1063/1.3460293; (c) 2010 American Institute of Physics; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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