Establishing the mechanism of thermally induced degradation of ZnO:Al electrical properties using synchrotron radiation

Journal Article · Mon Apr 05 00:00:00 EDT 2010 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3385024· OSTI ID:21347352

Vinnichenko, M; Cornelius, S; Shevchenko, N; Rogozin, A; Kolitsch, A; Munnik, F; Moeller, W ^[1]; Gago, R ^[2]

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1. Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, P.O. Box 510119, 01314 Dresden (Germany)
2. Instituto de Ciencia de Materiales de Madrid, Consejo Superior de Investigaciones Cientificas, E-28049 Madrid (Spain)

X-ray absorption near edge structure and x-ray diffraction studies with synchrotron radiation have been used to relate the electrical properties of ZnO:Al films to their bonding structure and phase composition. It is found that Al-sites in an insulating metastable homologous (ZnO){sub 3}Al{sub 2}O{sub 3} phase are favored above a certain substrate temperature (T{sub S}) leading to deterioration of both the crystallinity and the electrical properties of the films. The higher film resistivity is associated with lower carrier mobility due to increased free electron scattering. Lower metal to oxygen flux ratios during deposition expand the range of T{sub S} at which low-resistivity films are obtained.

• OSTI ID: 21347352
• Journal Information: Applied Physics Letters, Vol. 96, Issue 14; Other Information: DOI: 10.1063/1.3385024; (c) 2010 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ABSORPTION
ABSORPTION SPECTROSCOPY
ALUMINIUM
CARRIER MOBILITY
CRYSTAL GROWTH
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRONS
OXYGEN
SEMICONDUCTOR MATERIALS
SPUTTERING
SUBSTRATES
SYNCHROTRON RADIATION
THIN FILMS
X RADIATION
X-RAY DIFFRACTION
X-RAY SPECTROSCOPY
ZINC OXIDES
BREMSSTRAHLUNG
CHALCOGENIDES
COHERENT SCATTERING
DIFFRACTION
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
ELEMENTARY PARTICLES
ELEMENTS
FERMIONS
FILMS
IONIZING RADIATIONS
LEPTONS
MATERIALS
METALS
MOBILITY
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATIONS
SCATTERING
SORPTION
SPECTROSCOPY
ZINC COMPOUNDS