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Title: Formation of long-range ordered quantum dots arrays in amorphous matrix by ion beam irradiation

Abstract

We demonstrate the production of a well ordered three-dimensional array of Ge quantum dots in amorphous silica matrix. The ordering is achieved by ion beam irradiation and annealing of a multilayer film. Structural analysis shows that quantum dots nucleate along the direction of the ion beam used for irradiation, while the mutual distance of the quantum dots is determined by the diffusion properties of the multilayer material rather than the distances between traces of ions that are used for irradiation.

Authors:
 [1]; ; ; ; ;  [2];  [3];  [4];  [5];  [1]
  1. Charles University in Prague, Prague 12116 (Czech Republic)
  2. Ruder Boskovic Institute, Zagreb 10000 (Croatia)
  3. Jozef Stefan Institute, Ljubljana 1000 (Slovenia)
  4. Institute of Physics, Zagreb 10000 (Croatia)
  5. Sincrotrone Trieste, Basovizza 34012 (Italy)
Publication Date:
OSTI Identifier:
21294240
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 95; Journal Issue: 6; Other Information: DOI: 10.1063/1.3204007; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; AMORPHOUS STATE; ANNEALING; GERMANIUM; ION BEAMS; IRRADIATION; LAYERS; NUCLEATION; QUANTUM DOTS; SEMICONDUCTOR MATERIALS; SILICA; SILICON COMPOUNDS; THIN FILMS; THREE-DIMENSIONAL CALCULATIONS

Citation Formats

Buljan, M, Ruder Boskovic Institute, Zagreb 10000, Bogdanovic-Radovic, I, Karlusic, M, Desnica, U V, Radic, N, Dubcek, P, Drazic, G, Salamon, K, Bernstorff, S, and Holy, V. Formation of long-range ordered quantum dots arrays in amorphous matrix by ion beam irradiation. United States: N. p., 2009. Web. doi:10.1063/1.3204007.
Buljan, M, Ruder Boskovic Institute, Zagreb 10000, Bogdanovic-Radovic, I, Karlusic, M, Desnica, U V, Radic, N, Dubcek, P, Drazic, G, Salamon, K, Bernstorff, S, & Holy, V. Formation of long-range ordered quantum dots arrays in amorphous matrix by ion beam irradiation. United States. https://doi.org/10.1063/1.3204007
Buljan, M, Ruder Boskovic Institute, Zagreb 10000, Bogdanovic-Radovic, I, Karlusic, M, Desnica, U V, Radic, N, Dubcek, P, Drazic, G, Salamon, K, Bernstorff, S, and Holy, V. 2009. "Formation of long-range ordered quantum dots arrays in amorphous matrix by ion beam irradiation". United States. https://doi.org/10.1063/1.3204007.
@article{osti_21294240,
title = {Formation of long-range ordered quantum dots arrays in amorphous matrix by ion beam irradiation},
author = {Buljan, M and Ruder Boskovic Institute, Zagreb 10000 and Bogdanovic-Radovic, I and Karlusic, M and Desnica, U V and Radic, N and Dubcek, P and Drazic, G and Salamon, K and Bernstorff, S and Holy, V},
abstractNote = {We demonstrate the production of a well ordered three-dimensional array of Ge quantum dots in amorphous silica matrix. The ordering is achieved by ion beam irradiation and annealing of a multilayer film. Structural analysis shows that quantum dots nucleate along the direction of the ion beam used for irradiation, while the mutual distance of the quantum dots is determined by the diffusion properties of the multilayer material rather than the distances between traces of ions that are used for irradiation.},
doi = {10.1063/1.3204007},
url = {https://www.osti.gov/biblio/21294240}, journal = {Applied Physics Letters},
issn = {0003-6951},
number = 6,
volume = 95,
place = {United States},
year = {Mon Aug 10 00:00:00 EDT 2009},
month = {Mon Aug 10 00:00:00 EDT 2009}
}