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Title: Longitudinal bulk acoustic mass sensor

A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg (1 fg=10{sup -15} g) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total noise in the currently applied measurement system allows for a minimum detectable mass of 0.5 fg in air.
Authors:
; ; ;  [1]
  1. Department of Micro and Nanotechnology-DTU Nanotech, Technical University of Denmark, DTU Bldg. 345 East, DK-2800 Kongens Lyngby (Denmark)
Publication Date:
OSTI Identifier:
21294201
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 95; Journal Issue: 3; Other Information: DOI: 10.1063/1.3168519; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; AIR; ION BEAMS; NOISE; POLYCRYSTALS; SEMICONDUCTOR MATERIALS; SENSORS; SILICON; SOUND WAVES