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Title: Pressure dependent resonant frequency of micromechanical drumhead resonators

Abstract

We examine the relationship between squeeze film effects and resonance frequency in drum-type resonators. We find that the resonance frequency increases linearly with pressure as a result of the additional restoring force contribution from compression of gas within the drum cavity. We demonstrate trapping of the gas by squeeze film effects and geometry. The pressure sensitivity is shown to scale inversely with cavity height and sound radiation is found to be the predominant loss mechanism near and above atmospheric pressure. Drum resonators exhibit linearity and sensitivity suitable to barometry from below 10 Torr up to several atmospheres.

Authors:
; ;  [1]
  1. Center for Materials Research, Cornell University, Ithaca, New York 14853 (United States)
Publication Date:
OSTI Identifier:
21294110
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 94; Journal Issue: 21; Other Information: DOI: 10.1063/1.3141731; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ATMOSPHERES; ATMOSPHERIC PRESSURE; BAROMETERS; FILMS; PRESSURE DEPENDENCE; RESONATORS; SENSORS; SOUND WAVES

Citation Formats

Southworth, D R, Craighead, H G, and Parpia, J M. Pressure dependent resonant frequency of micromechanical drumhead resonators. United States: N. p., 2009. Web. doi:10.1063/1.3141731.
Southworth, D R, Craighead, H G, & Parpia, J M. Pressure dependent resonant frequency of micromechanical drumhead resonators. United States. https://doi.org/10.1063/1.3141731
Southworth, D R, Craighead, H G, and Parpia, J M. 2009. "Pressure dependent resonant frequency of micromechanical drumhead resonators". United States. https://doi.org/10.1063/1.3141731.
@article{osti_21294110,
title = {Pressure dependent resonant frequency of micromechanical drumhead resonators},
author = {Southworth, D R and Craighead, H G and Parpia, J M},
abstractNote = {We examine the relationship between squeeze film effects and resonance frequency in drum-type resonators. We find that the resonance frequency increases linearly with pressure as a result of the additional restoring force contribution from compression of gas within the drum cavity. We demonstrate trapping of the gas by squeeze film effects and geometry. The pressure sensitivity is shown to scale inversely with cavity height and sound radiation is found to be the predominant loss mechanism near and above atmospheric pressure. Drum resonators exhibit linearity and sensitivity suitable to barometry from below 10 Torr up to several atmospheres.},
doi = {10.1063/1.3141731},
url = {https://www.osti.gov/biblio/21294110}, journal = {Applied Physics Letters},
issn = {0003-6951},
number = 21,
volume = 94,
place = {United States},
year = {Mon May 25 00:00:00 EDT 2009},
month = {Mon May 25 00:00:00 EDT 2009}
}