Discharge parameters and dominant electron conductivity mechanism in a low-pressure planar magnetron discharge
- Plasma Laboratory, National Aerospace University 'KhAI', Kharkov 61070 (Ukraine)
- CSIRO Materials Science and Engineering, Plasma Nanoscience Centre Australia (PNCA), P.O. Box 218, Lindfield, New South Wales 2070 (Australia)
Parameters of a discharge sustained in a planar magnetron configuration with crossed electric and magnetic fields are studied experimentally and numerically. By comparing the data obtained in the experiment with the results of calculations made using the proposed theoretical model, conclusion was made about the leading role of the turbulence-driven Bohm electron conductivity in the low-pressure operation mode (up to 1 Pa) of the discharge in crossed electric and magnetic fields. A strong dependence of the width of the cathode sputter trench, associated with the ionization region of the magnetron discharge, on the discharge parameters was observed in the experiments. The experimental data were used as input parameters in the discharge model that describes the motion of secondary electrons across the magnetic field in the ionization region and takes into account the classical, near-wall, and Bohm mechanisms of electron conductivity.
- OSTI ID:
- 21277259
- Journal Information:
- Physics of Plasmas, Vol. 16, Issue 6; Other Information: DOI: 10.1063/1.3153554; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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