Ordering of Fine Particles in a Planar Magnetron Plasma
Journal Article
·
· AIP Conference Proceedings
- Kyoto Institute of Technology, Sakyo-ku, Kyoto 606-8585 (Japan)
- Okayama University, Tsushimanaka, Okayama 700-8530 (Japan)
- Yokohama National University, Hodogaya-ku, Yokohama 240-8501 (Japan)
- Tohoku University, Aoba-ku, Sendai 980-8579 (Japan)
- Kyushu University, Higashi-ku, Fukuoka 812-8581 (Japan)
- Japan Aerospace Exploration Agency, Sengen, Tsukuba 305-8505 (Japan)
Fine particles injected in a planar magnetron were pushed upward by diffusible plasma, leading to being suspended by the force balance with the gravity and forming three-dimensional structures on the two-dimensional structure formed by particle strings.
- OSTI ID:
- 21251245
- Journal Information:
- AIP Conference Proceedings, Vol. 1041, Issue 1; Conference: 5. international conference on the physics of dusty plasmas, Ponta Degada, Azores (Portugal), 18-23 May 2008; Other Information: DOI: 10.1063/1.2996957; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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