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Title: Electron Temperature and Density Variation Due To Temporal Evolution of Nano Particle Growth in RF Silane Plasma

Abstract

Nano particles, generated in various processing plasmas, have been extensively studied for applications in the fabrication of microelectronics devices. However, studies to find the relation between the particle parameters (particle size and density) and the plasma parameters (electron temperature and density) have been limited because of the availability of the appropriate diagnostic method. The utilization of Langmuir probes are limited in many cases due to the probe tip contamination and the presence of abundant negative ions and particles. In this work, measurements of electron temperature and ion density were performed in rf silane plasmas using a floating probe, which allows an accurate measurement even under harsh plasma environments. The size and density of nano particles were measured by the laser light scattering and the laser extinction method at various gas pressures. It was found that the temporal evolution of the particle growth played a significant role in changing the plasma parameters due to the electron and ion fluxes to the particles. The relation between the plasma parameters and the particle parameters was described by a power balance equation including the power loss to the particle surface.

Authors:
; ;  [1];  [2];  [3]
  1. Department of physics, Korea Advanced Institute of Science and Technology, 335 Gwahangno, Yuseong-gu, Daejeon, 305-701 (Korea, Republic of)
  2. Korea Research Institute of Standards and Science, P.O. Box 102, Yuseong-gu, Daejeon, 305-600 (Korea, Republic of)
  3. Department of Electric and Computer Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791 (Korea, Republic of)
Publication Date:
OSTI Identifier:
21251221
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1041; Journal Issue: 1; Conference: 5. international conference on the physics of dusty plasmas, Ponta Degada, Azores (Portugal), 18-23 May 2008; Other Information: DOI: 10.1063/1.2996822; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ANIONS; ELECTRON TEMPERATURE; ELECTRONS; FABRICATION; ION DENSITY; LANGMUIR PROBE; LASER SPECTROSCOPY; LASERS; LIGHT SCATTERING; PARTICLE SIZE; PLASMA; PLASMA DIAGNOSTICS; PLASMA PRODUCTION; RF SYSTEMS; SILANES; WALL EFFECTS

Citation Formats

Chai, K B, Seon, C R, Choe, W, Park, S, and Chung, C W. Electron Temperature and Density Variation Due To Temporal Evolution of Nano Particle Growth in RF Silane Plasma. United States: N. p., 2008. Web. doi:10.1063/1.2996822.
Chai, K B, Seon, C R, Choe, W, Park, S, & Chung, C W. Electron Temperature and Density Variation Due To Temporal Evolution of Nano Particle Growth in RF Silane Plasma. United States. https://doi.org/10.1063/1.2996822
Chai, K B, Seon, C R, Choe, W, Park, S, and Chung, C W. 2008. "Electron Temperature and Density Variation Due To Temporal Evolution of Nano Particle Growth in RF Silane Plasma". United States. https://doi.org/10.1063/1.2996822.
@article{osti_21251221,
title = {Electron Temperature and Density Variation Due To Temporal Evolution of Nano Particle Growth in RF Silane Plasma},
author = {Chai, K B and Seon, C R and Choe, W and Park, S and Chung, C W},
abstractNote = {Nano particles, generated in various processing plasmas, have been extensively studied for applications in the fabrication of microelectronics devices. However, studies to find the relation between the particle parameters (particle size and density) and the plasma parameters (electron temperature and density) have been limited because of the availability of the appropriate diagnostic method. The utilization of Langmuir probes are limited in many cases due to the probe tip contamination and the presence of abundant negative ions and particles. In this work, measurements of electron temperature and ion density were performed in rf silane plasmas using a floating probe, which allows an accurate measurement even under harsh plasma environments. The size and density of nano particles were measured by the laser light scattering and the laser extinction method at various gas pressures. It was found that the temporal evolution of the particle growth played a significant role in changing the plasma parameters due to the electron and ion fluxes to the particles. The relation between the plasma parameters and the particle parameters was described by a power balance equation including the power loss to the particle surface.},
doi = {10.1063/1.2996822},
url = {https://www.osti.gov/biblio/21251221}, journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1041,
place = {United States},
year = {Sun Sep 07 00:00:00 EDT 2008},
month = {Sun Sep 07 00:00:00 EDT 2008}
}